Growth of ultrathin Al2O3 islands on hBN particles by atomic layer deposition in a custom fluidized bed reactor using Al(CH3)3 and H2O
| Autor: | Uğur, Alper, Savacı, Umut, Ay, Nuran, Turan, Servet |
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| Zdroj: | In Applied Surface Science 30 January 2021 537 |
| Databáze: | ScienceDirect |
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