Self-focusing SIMS: A metrology solution to area selective deposition
| Autor: | Spampinato, Valentina a, ⁎, Armini, Silvia b, Franquet, Alexis a, Conard, Thierry a, van der Heide, Paul a, Vandervorst, Wilfried a, c |
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| Zdroj: | In Applied Surface Science 15 May 2019 476:594-599 |
| Databáze: | ScienceDirect |
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