The new mechanism of sputtering with cluster ion beams
| Autor: | Chernysh, V.S., Ieshkin, A.E., Ermakov, Yu.A. |
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| Zdroj: | In Applied Surface Science 30 January 2015 326:285-288 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chernysh, V.S., Ieshkin, A.E., Ermakov, Yu.A. |
|---|---|
| Zdroj: | In Applied Surface Science 30 January 2015 326:285-288 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect