Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow
| Autor: | Cech, Jiri, Pranov, Henrik, Kofod, Guggi, Matschuk, Maria, Murthy, Swathi, Taboryski, Rafael |
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| Zdroj: | In Applied Surface Science 1 September 2013 280:424-430 |
| Databáze: | ScienceDirect |
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