Near surface layer evolution in Zn+ ions implanted Si upon annealing treatments
| Autor: | Saraykin, V.V., Shcherbachev, K.D., Petrov, D.V., Privezentsev, V.V. |
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| Zdroj: | In Applied Surface Science 15 February 2013 267:97-100 |
| Databáze: | ScienceDirect |
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