Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS
| Autor: | Py, M., Saracco, E., Damlencourt, J.F., Barnes, J.P., Fabbri, J.M., Hartmann, J.M. |
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| Zdroj: | In Applied Surface Science 2011 257(22):9414-9419 |
| Databáze: | ScienceDirect |
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