Characterization of ion-induced sodium migration in various kinds of silicon oxide films
| Autor: | Saito, R. a, ∗, Nagatomo, M. a, Makino, N. a, Hayashi, S. b, Kudo, M. c |
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| Zdroj: | In Applied Surface Science 2003 203:508-511 |
| Databáze: | ScienceDirect |
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