Quadrupole lens alignment with improved STIM and secondary electron imaging for Proton Beam Writing
| Autor: | Qureshi, Sarfraz, Raman, P. Santhana, Stegmaier, Alrik, van Kan, Jeroen A. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 August 2017 404:74-80 |
| Databáze: | ScienceDirect |
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