Maskless nano-implant of 20 keV Ga+ in bulk Si(1 0 0) substrates
| Autor: | Milazzo, R.G., D’Arrigo, G., Mio, A.M., Rimini, E., Spinella, C., Peto, L., Nadzeyka, A., Bauerdick, S. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 December 2014 341:7-12 |
| Databáze: | ScienceDirect |
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