Low energy Cn cluster ion induced damage effects in Si(1 0 0) substrates

Autor: Lenka, H.P., Joseph, B., Kuiri, P.K., Sahu, G., Mahapatra, D.P.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B March 2007 256(2):665-668
Databáze: ScienceDirect