Variation of ion-irradiation induced strain as a function of ion fluence in Si

Autor: Raghu, L., Hatt, S., Kluth, P., Kluth, S.M., Dogra, R., Ridgway, M.C.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B April 2007 257(1-2):236-239
Databáze: ScienceDirect