Iso-concentration study of atomistic mechanism of B diffusion in Si
| Autor: | De Salvador, Davide, Napolitani, Enrico, Mirabella, Salvatore, Bisognin, Gabriele, Impellizzeri, Giuliana, Carnera, Alberto, Priolo, Francesco |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B April 2007 257(1-2):165-168 |
| Databáze: | ScienceDirect |
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