Compositional and structural changes in ZrOxNy films depending on growth condition
| Autor: | Carvalho, P., Fernandes, A.C., Rebouta, L., Vaz, F., Cunha, L., Kreissig, U., Barradas, N.P., Ramos, A.R., Alves, E. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2006 249(1-2):458-461 |
| Databáze: | ScienceDirect |
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