Reducing ultra-shallow boron diffusion using carbon and fluorine co-implantation
| Autor: | Vanderpool, Aaron, Taylor, Mitch |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2005 237(1-2):142-147 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Vanderpool, Aaron, Taylor, Mitch |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2005 237(1-2):142-147 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect