Electrical activation and lattice location of B and Ga impurities implanted in Si
| Autor: | Romano, Lucia, Piro, Alberto M., Napolitani, Enrico, Bisognin, Gabriele, Spada, Aldo, Grimaldi, Maria G., Rimini, Emanuele |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2004 219:727-731 |
| Databáze: | ScienceDirect |
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