Statistical 3D damage accumulation model for ion implant simulators
| Autor: | Hernández-Mangas, J.M., Lázaro, J., Enriquez, L., Bailón, L., Barbolla, J., Jaraı́z, M. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2003 202:138-142 |
| Databáze: | ScienceDirect |
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