Structural properties of thin films of high dielectric constant materials on silicon
| Autor: | Lu, H.C., Yasuda, N., Garfunkel, E., Gustafsson, T., Chang, J.P., Opila, R.L., Alers, G. |
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| Zdroj: | In Microelectronic Engineering 1999 48(1):287-290 |
| Databáze: | ScienceDirect |
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