Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA
| Autor: | Ellrott, Günter, Ogawa, Shinichi, Uno, Munenori, Morita, Yukinori, Manoharan, Muruganathan, Koleśnik-Gray, Maria, Krstić, Vojislav, Mizuta, Hiroshi |
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| Zdroj: | In Microelectronic Engineering 15 September 2021 249 |
| Databáze: | ScienceDirect |
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