Lithographic sonication patterning of large area GaN nanopillar forests grown on a Si substrate
| Autor: | Weber, J.C., Brubaker, M.D., Wallis, T.M., Bertness, K.A. |
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| Zdroj: | In Microelectronic Engineering 5 September 2017 181:43-46 |
| Databáze: | ScienceDirect |
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