SiOCH thin films deposited by chemical vapor deposition: From low-κ to chemical and biochemical sensors
| Autor: | Jousseaume, V., El Sabahy, J., Yeromonahos, C., Castellan, G., Bouamrani, A., Ricoul, F. |
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| Zdroj: | In Microelectronic Engineering 5 January 2017 167:69-79 |
| Databáze: | ScienceDirect |
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