Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus
| Autor: | Zhu, Hui, Qin, Xiaoye, Azcatl, Angelica, Addou, Rafik, McDonnell, Stephen, Ye, Peide D., Wallace, Robert M. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 November 2015 147:1-4 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect