Amorphous silicon carbide nitride layer as an alternative to a disordered silicon surface to suppress RF/microwave losses
| Autor: | Evseev, S.B., Nanver, L.K., Rejaei, B., Milosavljević, S. |
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| Zdroj: | In Microelectronic Engineering 1 August 2014 125:2-7 |
| Databáze: | ScienceDirect |
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