Charge trapping and electrical degradation in atomic layer deposited Al2O3 films
| Autor: | Gonzalez, M.B., Rafí, J.M., Beldarrain, O., Zabala, M., Campabadal, F. |
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| Zdroj: | In Microelectronic Engineering September 2013 109:57-59 |
| Databáze: | ScienceDirect |
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