Measurement and simulation of the pull-off strength at the separation of miniaturized 3D connectors consisting of silicon masters with undercuts and PDMS replicas
| Autor: | Zajadacz, J., Lorenz, P., Ehrhardt, M., Zimmer, K., Möllenbeck, S., Dhima, K., Scheer, H.-C. |
|---|---|
| Zdroj: | In Microelectronic Engineering January 2013 101:31-36 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect