High performance uncooled THz sensing structures based on antenna-coupled air-bridges

Autor: Ihring, A., Kessler, E., Dillner, U., Haenschke, F., Schinkel, U., Schubert, M., Haehle, R., Meyer, H.-G.
Zdroj: In Microelectronic Engineering October 2012 98:512-515
Databáze: ScienceDirect