ALD grown NbTaOx based MIM capacitors
| Autor: | Blomberg, T., Wenger, Ch., Baristiran Kaynak, C., Ruhl, G., Baumann, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):2447-2451 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Blomberg, T., Wenger, Ch., Baristiran Kaynak, C., Ruhl, G., Baumann, P. |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):2447-2451 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect