Al 2O 3 stacks on In 0.53Ga 0.47As substrates: In situ investigation of the interface
| Autor: | Fusi, M., Lamagna, L., Spiga, S., Fanciulli, M., Brammertz, G., Merckling, C., Meuris, M., Molle, A. |
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| Zdroj: | In Microelectronic Engineering 2011 88(4):435-439 |
| Databáze: | ScienceDirect |
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