The evolution of optical and electrical properties of low- k dielectrics under bias stress
| Autor: | Atkin, J.M., Cartier, E., Shaw, T.M., Lloyd, J.R., Laibowitz, R.B., Heinz, T.F. |
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| Zdroj: | In Microelectronic Engineering 2009 86(7):1891-1893 |
| Databáze: | ScienceDirect |
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