Effect of acid anion on the behavior of single component molecular resists incorporating ionic photoacid generators
| Autor: | Lawson, Richard A., Lee, Cheng-Tsung, Tolbert, Laren M., Henderson, Clifford L. |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):738-740 |
| Databáze: | ScienceDirect |
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