Application of the hybrid Hopkins–Abbe method in full-chip OPC
| Autor: | Adam, Konstantinos, Lam, Michael C., Cobb, Nick, Toublan, Olivier |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):492-496 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Adam, Konstantinos, Lam, Michael C., Cobb, Nick, Toublan, Olivier |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(4):492-496 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect