Density functional theory study of first-layer adsorption of ZrO 2 and HfO 2 on Ge(1 0 0)
Autor: | Grassman, T.J., Bishop, S.R., Kummel, A.C. |
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Zdroj: | In Microelectronic Engineering 2009 86(3):249-258 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Grassman, T.J., Bishop, S.R., Kummel, A.C. |
---|---|
Zdroj: | In Microelectronic Engineering 2009 86(3):249-258 |
Databáze: | ScienceDirect |
Externí odkaz: |