Copper stress migration at narrow metal finger with wide lead

Autor: Wang, Robin C.J., Chang-Liao, K.S., Oates, A.S., Lee, C.C., Chen, L.D., Chiu, C.C., Wu, Kenneth
Zdroj: In Microelectronic Engineering 2007 84(11):2697-2701
Databáze: ScienceDirect