Application of combinatorial methodologies for work function engineering of metal gate/high- κ advanced gate stacks
| Autor: | Green, M.L., Chang, K.-S., DeGendt, S., Schram, T., Hattrick-Simpers, J. |
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| Zdroj: | In Microelectronic Engineering 2007 84(9):2209-2212 |
| Databáze: | ScienceDirect |
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