Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
| Autor: | Rangelow, I.W., Ivanov, Tzv., Ivanova, K., Volland, B.E., Grabiec, P., Sarov, Y., Persaud, A., Gotszalk, T., Zawierucha, P., Zielony, M., Dontzov, D., Schmidt, B., Zier, M., Nikolov, N., Kostic, I., Engl, W., Sulzbach, T., Mielczarski, J., Kolb, S., Latimier, Du P., Pedreau, R., Djakov, V., Huq, S.E., Edinger, K., Fortagne, O., Almansa, A., Blom, H.O. |
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| Zdroj: | In Microelectronic Engineering 2007 84(5):1260-1264 |
| Databáze: | ScienceDirect |
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