Quantification of processing damage in porous low dielectric constant films
| Autor: | Baklanov, Mikhail R., Mogilnikov, Konstantin P., Le, Quoc Toan |
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| Zdroj: | In Microelectronic Engineering 2006 83(11):2287-2291 |
| Databáze: | ScienceDirect |
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| Autor: | Baklanov, Mikhail R., Mogilnikov, Konstantin P., Le, Quoc Toan |
|---|---|
| Zdroj: | In Microelectronic Engineering 2006 83(11):2287-2291 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect