Characterization of transient currents in HfO 2 capacitors in the short timescale

Autor: Monzio Compagnoni, Christian, Spinelli, Alessandro S., Bianchini, Andrea, Lacaita, Andrea L., Spiga, Sabina, Fanciulli, Marco
Zdroj: In Microelectronic Engineering 2006 83(10):1927-1930
Databáze: ScienceDirect