Studies of structures elaborated by focused ion beam induced deposition
| Autor: | Prestigiacomo, M. *, Roussel, L., Houël, A., Sudraud, P., Bedu, F., Tonneau, D., Safarov, V., Dallaporta, H. |
|---|---|
| Zdroj: | In Microelectronic Engineering October 2004 76(1-4):175-181 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect