Polymerization initiator effects on fluoropolymers for 157-nm single-layer resists

Autor:	Toriumi, M., Ishikawa, T., Kodani, T., Koh, M., Moriya, T., Yamashita, T., Araki, T., Aoyama, H., Hagiwara, T., Furukawa, T., Itani, T.
Zdroj:	In Microelectronic Engineering 2004 73:218-222
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect