Investigation of emission instabilities of liquid metal ion sources
| Autor: | Akhmadaliev, Ch., Bischoff, L., Mair, G.L.R., Aidinis, C.J., Ganetsos, Th. |
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| Zdroj: | In Microelectronic Engineering 2004 73:120-125 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Akhmadaliev, Ch., Bischoff, L., Mair, G.L.R., Aidinis, C.J., Ganetsos, Th. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2004 73:120-125 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect