EBSD measurement of strains in GaAs due to oxidation of buried AlGaAs layers
| Autor: | Keller, R.R, Roshko, A, Geiss, R.H, Bertness, K.A, Quinn, T.P |
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| Zdroj: | In Microelectronic Engineering 2004 75(1):96-102 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Keller, R.R, Roshko, A, Geiss, R.H, Bertness, K.A, Quinn, T.P |
|---|---|
| Zdroj: | In Microelectronic Engineering 2004 75(1):96-102 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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