Nanoscale surface roughness measurement based on frequency-domain interferometry principle
| Autor: | Zhang, Qiukun, Wang, Wenxuan, Zhong, Jialu, Lin, Jiewen, Chen, Jinguo, Luo, Manting, Yu, Yingjie |
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| Zdroj: | In Optics and Lasers in Engineering July 2024 178 |
| Databáze: | ScienceDirect |
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