Design and characterization of a two-axis, flexure-based nanopositioning stage with 50 mm travel and reduced higher order modes
| Autor: | Roy, Nilabh K., Cullinan, Michael A. |
|---|---|
| Zdroj: | In Precision Engineering July 2018 53:236-247 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect