Investigation of the pad-conditioning performance deterioration in the chemical mechanical polishing process
| Autor: | Kim, Hojoong, Hong, Seokjun, Shin, Cheolmin, Jin, Yinhua, Lim, Dong Hyun, Kim, Jun-yong, Hwang, Hasub, Kim, Taesung |
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| Zdroj: | In Wear 15 December 2017 392-393:93-98 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect