Surface cleaning efficiency measurements for UHV applications

Autor: Benvenuti, C., Canil, G., Chiggiato, P. *, Collin, P., Cosso, R., Guérin, J., Ilie, S., Latorre, D., Neil, K.S.
Zdroj: In Vacuum 1999 53(1):317-320
Databáze: ScienceDirect