Optimization of deconvoluted parameter for the quantification of high-resolution SIMS depth profiles

Autor: Li, T.T., Zhuang, X.M., Li, H.M., Xu, Y.X., Ma, Z.Q., Zheng, J.Q., Geng, Y.Q., Wang, C.L., Lian, S.Y., Wang, J.Y., Xu, C.K.
Zdroj: In Vacuum September 2023 215
Databáze: ScienceDirect