Multifactorial investigations of the deposition process – Material property relationships of ZnO:Al thin films deposited by magnetron sputtering in pulsed DC, DC and RF modes using different targets for low resistance highly transparent films on unheated substrates

Autor: Wójcicka, Aleksandra, Fogarassy, Zsolt, Rácz, Adél, Kravchuk, Tatyana, Sobczak, Grzegorz, Borysiewicz, Michał A.
Zdroj: In Vacuum September 2022 203
Databáze: ScienceDirect
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