Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Autor: | Moreira, Milena, Bjurström, Johan, Katardjev, Ilia, Yantchev, Ventsislav |
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Zdroj: | In Vacuum 2011 86(1):23-26 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Moreira, Milena, Bjurström, Johan, Katardjev, Ilia, Yantchev, Ventsislav |
---|---|
Zdroj: | In Vacuum 2011 86(1):23-26 |
Databáze: | ScienceDirect |
Externí odkaz: |