Study of defects in the near-surface layer created in silicon by H 2+ or He + implantation
| Autor: | Jung, Wojciech, Antonova, Irina V., Misiuk, Andrzej |
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| Zdroj: | In Vacuum 2007 81(9):1047-1050 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Jung, Wojciech, Antonova, Irina V., Misiuk, Andrzej |
|---|---|
| Zdroj: | In Vacuum 2007 81(9):1047-1050 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect