Redistribution of indium implanted in silicon due to thermal treatment and swift heavy ion irradiation
| Autor: | Komarov, F.F *, Vlasukova, L.A, Gaiduk, P.I, Mironov, A.M, Wesch, W, Kamarou, A.A, Yuvchenko, V.N |
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| Zdroj: | In Vacuum 2004 75(2):149-154 |
| Databáze: | ScienceDirect |
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