Impact of temperature and film thickness on α- and β- phase formation in Ga2O3 thin films grown on a-plane sapphire substrate

Autor: Butanovs, Edgars a, ⁎, Zubkins, Martins a, Strods, Edvards a, Vibornijs, Viktors a, Kadiwala, Kevon a, Ignatane, Liga a, Polyakov, Boris a, Vlassov, Sergei b, Purans, Juris a
Zdroj: In Thin Solid Films 30 August 2024 803
Databáze: ScienceDirect