Impact of temperature and film thickness on α- and β- phase formation in Ga2O3 thin films grown on a-plane sapphire substrate
Autor: | Butanovs, Edgars a, ⁎, Zubkins, Martins a, Strods, Edvards a, Vibornijs, Viktors a, Kadiwala, Kevon a, Ignatane, Liga a, Polyakov, Boris a, Vlassov, Sergei b, Purans, Juris a |
---|---|
Zdroj: | In Thin Solid Films 30 August 2024 803 |
Databáze: | ScienceDirect |
Externí odkaz: |